This class explores scaling laws in MEMS/NEMS. The dominant physical effects and scaling effects when downsizing sensors and actuators in microsystems are analysed, across a broad range of actuation principles.
- Professor: Herbert Shea
This class explores scaling laws in MEMS/NEMS. The dominant physical effects and scaling effects when downsizing sensors and actuators in microsystems are analysed, across a broad range of actuation principles.
Follow the pulses of EPFL on social networks
© 2023 EPFL, all rights reserved