In a first part we look at standard micro structuration techniques: Photolithography, wet etching, ion beam etching, dry etching.
In a second part, we treat more exploratory methods and methods for research: e-beam lithography, patterning and selective deposition, atom manipulation by micro probe techniques, self assembly approaches.
Finally we look also into so-called mesoscopic techniques, which are intermediate in length scales between classical machining and micromachining. Finally we shall also get some ideas about 3D printing techniques.
- Professor: Paul Muralt
Methods of Surface Analysis
Part 1: Spectroscopic and Diffraction methods: X-ray Photoelectron Spectroscopy, Auger Electron Spectroscopy, Secondary Ion Mass Spectroscopy, Low Energy Electron Spectroscopy, Reflection High Energy Electron Spectroscopy
Part 2: Microprobe techniques: Scanning Tunneling Microscopy, Atomic Force Microscopy
Practical works: Solving a material problem with surface analysis