This doctoral class covers the scaling of MEMS devices, including mechanical, thermal, electrostatic, electromagnetic, and microfluidic aspects.
- Introduction to scaling laws: scaling of classical mechanical systems, scaling of classical electrical systems, breakdown in scaling, quantum breakdown.
- Mechanical scaling: mass-spring model, mechanical noise, squeeze film effects.
- Thermal scaling: conduction, convection, dynamics, breakdown, thermal micro-actuators.
- Microfluidic scaling: liquid flow, gas flow, diffusion-mixing, surface tension,
- Electrostatic scaling: parallel plate actuators, zipping actuators, electrostatic breakdown
- Piezo-scaling
- Professor: Herbert Shea
The course provides the basis to understand the physics, the key
performance, and the research and industrial applications of magnetic
sensors and actuators. Together with a detailed introduction to
magnetism, several magnetic sensors
and actuators are studied.
- Professor: Giovanni Boero
- Teacher: Lucie Auberson
Micro- and nanofabrication can be taught to students and professionals by textbooks and ex-cathedra lectures, but the real learning comes from seeing the manufacturing steps as they happen. This MOOC will not only explain the basics of microfabrication but also show the practice through videos.
- Professor: Jürgen Brugger
- Professor: Martinus Gijs
- Teacher: Sönke Menke
- Teacher: Qinglan Shan
- Teacher: Pol Torres Vila
Liquid flow on the microscale often does not behave as we would expect intuitively from our macroscopic point of view. The goal of this course is to provide insight into specific fluidic phenomena that appear on the microscale. A representative range of lab-on-a-chip devices and applications will be discussed to exemplify these specific properties. Starting by exploring the Navier-Stokes and Stokes equations, we will discuss basic microfluidic concepts, with specific focus on pressure-driven flows. Diffusion and on-chip mixing approaches will also be analyzed. An introduction to droplet microfluidics will be presented. A second part of the course addresses the physical/theoretical background of liquid transport by means of electrical fields on the micro- and nanoscale (electroosmosis). We will also derive the formulas governing the manipulation of cells or particles by electric forces (dielectrophoresis) and by magnetic forces in microfluidic devices.
- Professor: Martinus Gijs
- Professor: Thomas Lehnert
This course introduces advanced fabrication methods enabling the
manufacturing of novel and micro- and nanoscale systems. Both top-down
(stenciling, scanning probes, additive techniques) and bottom-up
approaches (self-assembly) are presented, which complement established
fabrication tools.
- Professor: Karl Bohringer
- Professor: Jürgen Brugger
- Professor: Massimo Mastrangeli
- Professor: Francesc Perez-Murano
