The course provides the basis to understand the physics, the key
performance, and the research and industrial applications of magnetic
sensors and actuators. Together with a detailed introduction to
magnetism, several magnetic sensors
and actuators are studied.
Micro-optics and optical MEMS comprise advanced techniques to manipulate
light with superior precision and speed to realize compact yet
versatile optoelectronic systems. MICRO605 covers the necessary theory,
basic practical aspects, and the device and system concepts for these
closely related fields
- Professor: Hans Peter Herzig
This course provides an overview of RF MEMS/NEMS switches, passives, resonators, phase shifters and filters including hybrid devices (resonant-gate MOS transistor), carbon and phase-change materials, heterogeneous integration and a tutorial in S-parameters measurements and calibration techniques.
The course covers the entire field of lab-on-a-chip technology,
including microfluidic principles and various microfabrication
approaches, and presenting concrete examples of devices for
(bio)analysis, cell biology, tissue regeneration and microreactors.
- Professor: Séverine Le Gac
This course introduces advanced fabrication methods enabling the
manufacturing of novel and micro- and nanoscale systems. Both top-down
(stenciling, scanning probes, additive techniques) and bottom-up
approaches (self-assembly) are presented, which complement established
- Professor: Jürgen Brugger